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Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 293-296

Comparison of the structural and optical properties of zinc oxide thin films deposited by d.c. and r.f. sputtering and spray pyrolysis

Author keywords

Spray pyrolysis; Sputtering; Structure; Transmittance; ZnO thin films

Indexed keywords

CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; HEAT TREATMENT; MAGNETRON SPUTTERING; OPACITY; OPTICAL PROPERTIES; PHASE COMPOSITION; PYROLYSIS; SPUTTER DEPOSITION; THERMAL EFFECTS; THIN FILMS;

EID: 24644479647     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.02.012     Document Type: Article
Times cited : (44)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.