Ion mass interferences and matrix effects on SIMS depth profiling of thin Ti/Si multilayer films induced by hydrogen, carbon and oxygen contaminations

International Journal of Mass Spectrometry

Volumn 263, Issue 1, 2007, Pages 54-58

  Cwil, M ^a,b   Konarski, P ^a   Ciosek, J ^c  

^a TELE AND RADIO RESEARCH INSTITUTE   (Poland)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^c MILITARY UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Mass interferences; Matrix effects; SIMS; Ti Si multilayers; Titanium silicides

Indexed keywords

EID: 34147186782     PISSN: 13873806     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijms.2006.12.004     Document Type: Article

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