Optical properties of amorphous carbon nitride films with high nitrogen content

Diamond and Related Materials

Volumn 16, Issue 4-7 SPEC. ISS., 2007, Pages 1340-1342

  Habuchi, H ^a   Koketsu, H ^a   Katsuno, T ^b  

^a GIFU NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b GIFU UNIVERSITY   (Japan)

Author keywords

Amorphous; Carbon nitride; Optical properties; Sputtering

Indexed keywords

AMORPHOUS CARBON; CARBON NITRIDE; CRYSTAL DEFECTS; ENERGY GAP; MAGNETRON SPUTTERING; NITROGEN; OPTICAL PROPERTIES;

CARBON NITRIDE FILMS; REACTIVE MAGNETRON SPUTTERING; URBACH TAIL ENERGY;

THIN FILMS;

EID: 34047250116     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.01.028     Document Type: Article

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