Optical behavior of reactive sputtered carbon nitride films

Journal of Applied Physics

Volumn 91, Issue 5, 2002, Pages 2812-2817

  Wei, J ^a   Hing, P ^b  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33845466664     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1446224     Document Type: Article

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