Properties of amorphous carbon nitride a-CNx films prepared by the layer-by-layer method

Diamond and Related Materials

Volumn 12, Issue 10-11, 2003, Pages 1887-1890

  Katsuno, T ^a   Nitta, S ^a  

^a GIFU UNIVERSITY   (Japan)

Author keywords

Amorphous; Carbon; Layer by layer method; Nitrides

Indexed keywords

DEPOSITION; DIAMOND LIKE CARBON FILMS; ELECTRON SPIN RESONANCE SPECTROSCOPY; FILM PREPARATION; OPACITY; PHOTOCONDUCTIVITY; PHOTOSENSITIVITY; X RAY PHOTOELECTRON SPECTROSCOPY;

CYCLIC PROCESS;

CARBON NITRIDE;

CARBON NITRIDE;

EID: 0347379738     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00316-9     Document Type: Article

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