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Volumn 123-124, Issue , 2005, Pages 453-458
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Fabrication of a peristaltic PDMS micropump
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Author keywords
Flow rate; Peristaltic thermopneumatic micropump; Polydimethylsiloxane (PDMS)
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Indexed keywords
ACTUATORS;
DIAPHRAGMS;
ELECTRIC POTENTIAL;
FLOW MEASUREMENT;
MACHINE DESIGN;
MICROELECTROMECHANICAL DEVICES;
MOLDING;
PNEUMATIC EQUIPMENT;
SILICONES;
SPIN COATING;
FLOW RATE;
FRAME ANALYSIS;
PERISTALTIC THERMOPNEUMATIC MICROPUMP;
POLYDIMETHYLSILOAXANE (PDMS);
PUMPS;
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EID: 24944473399
PISSN: 09244247
EISSN: None
Source Type: Journal
DOI: 10.1016/j.sna.2005.01.035 Document Type: Conference Paper |
Times cited : (117)
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References (6)
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