Development of a microlateral force sensor and its evaluation using lateral force microscopy

Review of Scientific Instruments

Volumn 78, Issue 3, 2007, Pages

  Ando, Yasuhisa ^a   Shiraishi, Naoki ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b OLYMPUS CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; BIAS VOLTAGE; ELECTRON TUNNELING;

MICROLATERAL FORCE SENSORS (MLFS); RASTER SCANNING; SENSING TABLE;

MICROSENSORS;

EID: 34047183754     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2714038     Document Type: Article

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