Effects of surface treatments on hexagonal InN films grown on sapphire substrates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 1, 2007, Pages 199-201

  Cao, L ^a   Xie, Z L ^a   Liu, B ^a   Xiu, X Q ^a   Zhang, R ^a   Zheng, Y D ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; FILM GROWTH; INDIUM COMPOUNDS; SAPPHIRE; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON CONTAMINATIONS; SAPPHIRE SUBSTRATES; SURFACE OXIDATION;

SURFACE TREATMENT;

EID: 34047160138     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2387161     Document Type: Article

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