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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 2, 1999, Pages 497-499

Effect of surface treatment by (NH4)2Sx solution on the reduction of ohmic contact resistivity of p-type GaN

(1) Kim, Jong Kyu a

a Pohang University of Science and Technology (POSTECH) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644449418 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (45)

References (14)

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