Effect of surface roughness of the neutralization grid on the energy and flux of fast neutrals and residual ions extracted from a neutral beam source

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 1, 2007, Pages 258-263

  Ranjan, Alok ^a   Helmbrecht, Clemens ^b   Donnelly, Vincent M ^a   Economou, Demetre J ^a   Franz, Gerhard F ^b  

^a UNIVERSITY OF HOUSTON   (United States)

^b UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

NEUTRAL BEAM ENERGIES; PLASMA CONDITIONS; SPECULAR REFLECTIONS;

ANISOTROPIC ETCHING; ENERGY DISSIPATION; INDUCTIVELY COUPLED PLASMA; ION BEAMS; PLASMA THEORY; SURFACE ROUGHNESS;

ION SOURCES;

EID: 34047141834     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2433983     Document Type: Article

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