Energy distribution and flux of fast neutrals and residual ions extracted from a neutral beam source

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 5, 2006, Pages 1839-1846

  Ranjan, Alok ^a   Donnelly, Vincent M ^a   Economou, Demetre J ^a  

^a UNIVERSITY OF HOUSTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO HOLES; FAST NEUTRALS; NEUTRAL BEAM SOURCE; NEUTRAL BEAMS;

ARGON; ELECTRIC POTENTIAL; INDUCTIVELY COUPLED PLASMA; ION BEAMS; POSITIVE IONS; PRESSURE EFFECTS;

BEAM PLASMA INTERACTIONS;

EID: 33748557528     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2244537     Document Type: Article

References (29)

1. S. Samukawa, Appl. Phys. Lett. 64, 3398 (1994).
2. N. Fujiwara, T. Marayama, and M. Yoneda, Jpn. J. Appl. Phys., Part 1 35, 2450 (1996).
3. G. S. Hwang and K. P. Giapis, J. Appl. Phys. 82, 566 (1997).
4. D. J. Economou and R. Alkire, J. Electrochem. Soc. 135, 941 (1988).
5. J. C. Arnold and H. H. Sawin, J. Appl. Phys. 70, 5314 (1992).
6. H. Kuwano and F. Shimokawa, J. Vac. Sci. Technol. B 6, 1565 (1988).
7. F. Shimokawa, H. Tanaka, Y. Uenishi, and R. Sawada, J. Appl. Phys. 66, 2613 (1989).
8. T. Mizutani and T. Yunogami, Jpn. J. Appl. Phys., Part 1 29, 2220 (1990).
9. T. Yunogami, K. Yogokawa, and T. Mizutani, J. Vac. Sci. Technol. A 13, 952 (1995).
10. K. Yokogawa, T. Yunigami, and T. Mizutani, Jpn. J. Appl. Phys., Part 1 35, 1901 (1996).
11. T. Tsuchizawa, Y. Jin, and S. Matsuo, Jpn. J. Appl. Phys., Part 1 33, 2200 (1994).
12. Y. Jin, T. Tsuchizawa, and S. Matsuo, Jpn. J. Appl. Phys., Part 2 34, 465 (1995).
13. S. Panda, D. J. Economou, and L. Chen, J. Vac. Sci. Technol. A 19, 398 (2001).
14. S. Samukawa, K. Sakamoto, and K. Ichiki, J. Vac. Sci. Technol. A 20, 1566 (2002).
15. S. Noda, H. Nishimori, T. Iida, T. Arikado, K. Ichiki, T. Ozaki, and S. Samukawa, J. Vac. Sci. Technol. A 22, 1506 (2004).
16. H. Ohtake, N. Inoue, T. Ozaki, and S. Samukawa, J. Vac. Sci. Technol. B 23, 210 (2005).
17. D. Kim and D. J. Economou, IEEE Trans. Plasma Sci. 30, 2048 (2002).
18. R. C. Wetzel, F. A. Baiocchi, T. R. Hayes, and R. S. Freund, Phys. Rev. A 35, 559 (1987).
19. G. D. Yarnold and H. C. Bolton, Rev. Sci. Instrum. 26, 38 (1949).
20. G. A. narrower, Rev. Sci. Instrum. 26, 850 (1955).
21. C.-K. Kim and D. J. Economou, J. Appl. Phys. 91, 2594 (2002).
22. E. W. McDaniel, J. B. A. Mitchell, and M. E. Rudd, Atomic Collisions: Heavy Particles Projectiles (Wiley, New York, 1993).
23. D. Kim and D. J. Economou. J. Vac. Sci. Technol. B 21, 1248 (2003).
24. B. A. Helmer and D. B. Graves, J. Vac. Sci. Technol. A 16, 3502 (1998).
25. J. R. Woodworth, M. E. Riley, D. C. Meister, B. P. Aragon, M. S. Lee, and H. H. Sawin, J. Appl. Phys. 80, 1304 (1996).
26. C. Helmbrecht, M.S. thesis, University of Applied Sciences, 2005.
27. P. Beniot-Cattin and L. C. Bernard, J. Appl. Phys. 39, 5723 (1969).
28. Y. Okamoto and H. Tamagawa, J. Phys. Soc. Jpn. 27, 270 (1969).
29. Y. Okamoto and H. Tamagawa, J. Phys. Soc. Jpn. 29, 187 (1970).