Use of Plasma processing in making integrated circuits and flat-panel displays

MRS Bulletin

Volumn 21, Issue 8, 1996, Pages 38-42

  Gottscho, Richard A ^a   Barone, Maria E ^a   Cook, Joel M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042089664     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/S0883769400035697     Document Type: Article

References (21)

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