Novel equipment for friction force measurement on MEMS and micro components

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4407, Issue , 2001, Pages 158-163

  Schmidt, M ^a   Wortmann, A ^a   Luthje H ^a   Buttgenbach S ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Friction; Measurement system; Micro actuator; Tester

Indexed keywords

FRICTION; MICROACTUATORS; OPTIMIZATION; THIN FILMS; TRIBOLOGY;

FRICTION FORCE MEASUREMENTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034839343     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.425297     Document Type: Article

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