High- Q micromachined three-dimensional integrated inductors for high-frequency applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 1, 2007, Pages 264-270

  Weon, Dae Hee ^a   Jeon, Jong Hyeok ^a   Mohammadi, Saeed ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH-FREQUENCY PERFORMANCE; INTEGRATED INDUCTORS; SELF-RESONANT FREQUENCY;

AMMONIUM COMPOUNDS; CAPACITANCE; ELECTRIC CONDUCTIVITY; MICROMACHINING; NATURAL FREQUENCIES; SUBSTRATES;

ELECTRIC INDUCTORS;

EID: 34047098989     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2433984     Document Type: Article

References (28)

1. N. Zamdmer et al., VLSI Technology Symposium, Digest of Technical Papers, June 2001, pp. 85-86.
2. T. H. Lee, The Design of CMOS Radio-Frequency Integrated Circuits, 2nd ed. (Cambridge University Press, Cambridge, UK, 2003), Chap., p. 364.
3. D. K. Shaeffer and T. H. Lee, IEEE J. Solid-State Circuits 32, 745 (1997).
4. S. S. Ko and S. C. Hong, IEEE Microw. Wirel. Compon. Lett. 15, 673 (2005).
5. P. D. Tseng, L. Zhang, G. B. Gao, and M. F. Chang, IEEE J. Solid-State Circuits 35, 1338 (2000).
6. D. A. Daly, IEEE Trans. Microwave Theory Tech. 15, 713 (1967).
7. M. Caulton, B. Hershenov, S. P. Knight, and R. E. DeBrecht, IEEE Trans. Microwave Theory Tech. 19, 588 (1971).
8. I. J. Bahl, IEEE Trans. Microwave Theory Tech. 49, 654 (2001).
9. K. B. Ashby, I. A. Koullias, W. C. Finley, J. J. Bastek, and S. Moinian, IEEE Trans. Microwave Theory Tech. MTT-44, 896 (1996).
10. L. E. Larson et al., Proceedings of the 43rd International Solid-State Circuits Conference, San Francisco, CA, 1996, pp. 80-81.
11. C. H. Chen, Y. K. Fang, C. W. Yang, and C. S. Tang, IEEE Electron Device Lett. 22, 522 (2001).
12. T. S. D. Cheung and J. R. Long, IEEE J. Solid-State Circuits 41, 1183 (2006).
13. Y.-J. Kim and M. G. Allen, IEEE Trans. Compon., Packag., Manuf. Technol., Part C 21, 26 (1998).
14. J. B. Yoon, Y. S. Choi, B. I. Kim, Y. S. Eo, and E. S. Yoon, IEEE Electron Device Lett. 23, 591 (2002).
15. J. B. Yoon, C. H. Han, E. S. Yoon, and C. K. Kim, Tech. Dig. - Int. Electron Devices Meet. 1999, 753.
16. G. Carchon, X. Sun, G. Posada, D. Linten, and E. Beyne, IEEE International Solid-State Circuits Conference, Dig. Tech. Papers, 6-10 Feb. 1996, pp. 398-399.
17. D. Linten et al., IEEE J. Solid-State Circuits 40, 1922 (2005).
18. G. Carchon, X. Sun, and W. Raedt, Proceedings of the 54th IEEE Electronic Components and Technology Conference, 2004 IEEE, June 2004, pp. 1118-1123.
19. D. J. Young, V. Malba, J.-J. Ou, A. F. Bernhardt, and B. E. Boser, Tech. Dig. - Int. Electron Devices Meet. 1997, 67.
20. Y. J. Kim and M. G. Allen, 48th IEEE Electronic Components and Technology Conference, May 1998, pp. 1247-1252.
21. J. B. Yoon, B. K. Kim, C. H. Han, E. Yoon, and C. K. Kim, IEEE Electron Device Lett. 20, 487 (1999).
22. K. L. Scott, T. Hirano, H. Yang, H. Singh, R. T. Howe, and A. M. Niknejad, J. Microelectromech. Syst. 13, 300 (2004).
23. C. L. Chua, D. K. Fork, K. V. Schuylenbergh, and J. P. Lu, J. Microelectromech. Syst. 12, 989 (2003).
24. D. H. Weon, J. H. Jeon, J. I. Kim, S. Mohammadi, and L. P. B. Katehi, IEEE MTT-S Int. Microwave Symp. Dig. 2, 877 (2004).
25. D. H. Weon, J. I. Kim, J. H. Jeon, S. Mohammadi, and L. P. B. Katehi, IEEE MTT-S Int. Microwave Symp. Dig. 2, 701 (2005).
26. A.-V. Pham, 2006 IEEE International Microwave Symposium Workshop, San Francisco, CA, 11-16 June 2006 (unpublished).
27. J. Muldavin, C. Bozler, C.-L. Chen, S. Rabe, P. Wyatt, and C. Keast, 2006 IEEE International Microwave Symposium Workshop, San Francisco, CA, 11-16 June 2006 (unpublished).
28. L. Schimpf, B. Benna, and D. Proetel, Proceedings of the 2001 IEEE International Conference on Microelectronic Test Structures, 2001, Vol. 14, pp. 115-118.