A corrugated bridge of low residual stress for RF-MEMS switch

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 818-826

  Song, Yo Tak ^a   Lee, Hai Young ^a   Esashi, Masayoshi ^b  

^a Ajou University   (South Korea)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Corrugated membrane; Low actuation voltage; Microwave and millimeter wave; Residual stress; RF MEMS switch

Indexed keywords

COPLANAR WAVEGUIDES; ELECTRIC CONDUCTIVITY; FINITE ELEMENT METHOD; MEMS; MICROWAVES; MILLIMETER WAVES; RESIDUAL STRESSES;

CORRUGATED BRIDGE; CORRUGATED MEMBRANE; CORRUGATION CONSTANT;

ELECTRIC SWITCHES;

EID: 34047096556     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.07.030     Document Type: Article

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