In-Situ and Ex-situ measurements on silicon thin films fabricated by excimer laser annealing

Journal of Physics: Conference Series

Volumn 48, Issue 1, 2006, Pages 937-944

  Kuo, Chil Chyuan ^a,b   Yeh, Wen Chang ^a   Lee, Ji Feng ^a   Jeng, Jeng Ywan ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33947629070     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/48/1/177     Document Type: Article

References (18)

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