Ti-Ni shape memory alloy film-actuated microstructures for a MEMS probe card

Journal of Micromechanics and Microengineering

Volumn 17, Issue 1, 2007, Pages 154-162

  Namazu, Takahiro ^a   Tashiro, Youichi ^a   Inoue, Shozo ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT RESISTANCE; DEFORMATION; ELECTRODES; MEMS; MICROSTRUCTURE; SHAPE MEMORY EFFECT;

ACTUATED MICROSTRUCTURES; CONTACT FORCE; THERMOMECHANICAL DEFORMATION;

CANTILEVER BEAMS;

EID: 33947593586     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/1/020     Document Type: Article

References (16)

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