Thermomechanical behavior of Ti-Ni shape memory alloy films deposited by DC magnetron sputtering

Vacuum

Volumn 80, Issue 7 SPEC. ISS., 2006, Pages 726-731

  Namazu, Takahiro ^a   Inoue, Shozo ^a   Hashizume, Akinobu ^a   Koterazawa, Keiji ^a  

^a Graduate School of Engineering   (Japan)

Author keywords

Constitutive equation; Film composition; Magnetron sputtering; Mechanical property; Shape memory alloy; Ti Ni film; Young's modulus

Indexed keywords

COMPOSITION; ELASTIC MODULI; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES; SHAPE MEMORY EFFECT; THERMOMECHANICAL TREATMENT; TITANIUM ALLOYS;

CONSTITUTIVE EQUATION; FILM COMPOSITION; SUPERELASTIC BEHAVIOR; TI-NI FILM;

METALLIC FILMS;

EID: 33646542704     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.11.043     Document Type: Article

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