Mechanical Properties of Polycrystalline Titanium Nitride Films Measured by XRD Tensile Testing

ieej transactions on sensors and micromachines

Volumn 125, Issue 9, 2006, Pages 374-379

  Namazu, Takahiro ^a   Inoue, Shozo ^a   Takemoto, Hideki ^a   Koterazawa, Keiji ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

fracture strength; lateral strain; Poisson's ratio; Tensile test; TiN film; X ray diffraction (XRD); Young's modulus

Indexed keywords

EID: 85009643373     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.125.374     Document Type: Article

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