MaxFlow theory for availability calculation of automated material handling systems

Robotics and Computer-Integrated Manufacturing

Volumn 19, Issue 1-2, 2003, Pages 141-145

  Beschorner, Alin ^a   Glüer, Detlev ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

Automated material handling systems; MaxFlow approach; Semiconductor manufacturing

Indexed keywords

COMPUTER SIMULATION; MATERIALS HANDLING; SEMICONDUCTOR DEVICE MANUFACTURE; USER INTERFACES; WSI CIRCUITS;

MAXFLOW THEORY;

COMPUTER INTEGRATED MANUFACTURING;

EID: 0037323581     PISSN: 07365845     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0736-5845(02)00071-6     Document Type: Conference Paper

References (5)

1. Bader U, Besler A, Schliesser J, Dorner J. A view to the future-a modular simulation kit for cost-efficient fab-wide planning and the simulation of automated material handling systems in the semiconductor industry. 10th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC' 99). September 8-10, 1999, Boston, USA, pp.109-12.
2. Ford L. Jr., Fulkerson D. Flows in networks. 1962;University Press, Princeton, NJ.
3. Glüer D. Issues for automation in semiconductor manufacturing. Automatisierungstechnik: 50(1):2002;28-33.
4. Beschorner A. Entwicklung von Berechnungsverfahren zur Verfügbarkeitsanalyse eines verteilten Transportsystems. Diplomarbeit an der HTWK Leipzig, 2001.
5. Nägler G, Stopp F, Graphen und Anwendungen, Stuttgart: Teubner, 1996.