Performance evaluation of an automated material handling system for a wafer fab

Robotics and Computer-Integrated Manufacturing

Volumn 20, Issue 2, 2004, Pages 91-100

  Wang, F K ^a   Lin, J T ^b  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

AMHS; Interbay; Intrabay; Performance evaluation; Simulation

Indexed keywords

AUTOMATION; COMPUTER SIMULATION; CONTROL SYSTEM ANALYSIS; DATA REDUCTION; INFORMATION ANALYSIS; MATERIALS HANDLING; MATHEMATICAL MODELS; OPTIMIZATION; PERFORMANCE; SCHEDULING; VEHICLES; WEIBULL DISTRIBUTION;

AUTOMATED MATERIAL HANDLING SYSTEM (AMHS); INTERBAY; INTRABAY; PERFORMANCE EVALUATION;

COMPUTER INTEGRATED MANUFACTURING;

EID: 1642587713     PISSN: 07365845     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.rcim.2003.08.002     Document Type: Article

References (15)

1. Davis F., Weiss M. Addressing automated materials handling in an existing wafer fab. Semicond Int. 18:1995;3.
2. Cardarelli G., Pelagagge P.M., Granito A. Track-robot for wafer fabrication intrabay handling. Assem Automat. 13:1993;25-29.
3. Jefferson T. Simulation in the design of ground-based intrabay automation systems. Proceedings of the IEEE Winter Simulation Conference, Coronado, CA, USA 1996. p. 1008-13.
4. Mackulak GT, Lawrence FP, Rayter J. Simulation analysis of 300 mm intrabay automation vehicle capacity alternatives. IEEE/SEMI Advanced Semiconductor Manufacturing Conference, Boston, MA, USA 1998. p. 445-50.
5. Wright R., Cunningham C., Benhayoune K., Campbell E., Swaminathan V., White R. 300. mm factory layout and automated materials handling Solid State Technol. 35:1999;35-42.
6. Lin JT, Wang FK, Yen PY. Simulation analysis of 300 mm intrabay automation for a wafer fab 2003, working paper.
7. Pillai D. Material handling automation for wafer fabrication facilities. Proceedings of the IEEE/CHMT Ninth International Electronic Manufacturing Technology Symposium, Washington, DC, USA 1990. p. 277-86.
8. Pierce NG, Stafford R. Modeling and simulation of material handling for semiconductor wafer fabrication. Proceedings of the IEEE Winter Simulation Conference, Lake Buena Vista, FL, USA 1994. p. 900-6.
9. Cardarelli G., Pelagagge P.M., Granito A. Performance analysis of automated interbay material-handling and storage systems for large wafer fab. Robotics Comput-Integr Manuf. 12:1996;227-234.
10. Colvin T.D., Lawrence F.P., Mackulak G.T. Soft simulation crucial for new automated fab decisions. Solid State Technol. 41:1998;161-168. (June).
11. Lin J.T., Wang F.K., Yen P.Y. Simulation analysis of dispatching rules for an automated interbay material handling system in wafer fab. Int J Prod Res. 39:2001;1221-1238.
12. Lin J.T., Wang F.K., Wu C.K. Connecting transport AMHS in a wafer fab. Int J Prod Res. 41:2003;529-544.
13. Lin J.T., Wang F.K., Wu C.K. Simulation analysis of the connecting transport AMHS in a wafer fab. IEEE Trans Semicond Manuf. 16:2003;1-11.
14. Cardarelli G., Pelagagge P.M. Simulation tool for design and management optimization of automated interbay material handling and storage systems for large wafer fab. IEEE Trans Semicond Manuf. 8:1995;44-49.
15. Design-Expert, Version 5.0.8, Stat-Ease, Minneapolis, MN, 1997.