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Volumn 12, Issue 3, 1996, Pages 227-234

Performance analysis of automated interbay material-handling and storage systems for large Wafer Fab

Author keywords

Interoperational storage; Material handling; Performance optimization; Simulation; Wafer Fab

Indexed keywords

AUTOMATION; OPTIMIZATION; PRODUCTION CONTROL; SIMULATION; STORAGE (MATERIALS); WAREHOUSES;

EID: 0030233877     PISSN: 07365845     EISSN: None     Source Type: Journal    
DOI: 10.1016/0736-5845(96)00010-5     Document Type: Article
Times cited : (8)

References (10)
  • 2
    • 0002893970 scopus 로고
    • Simulation tool for design and management optimization of automated interbay material handling and storage systems for large Wafer Fab
    • Cardarelli, G., Pelagagge, P. M.: Simulation tool for design and management optimization of automated interbay material handling and storage systems for large Wafer Fab. IEEE Trans. Semiconductor Mfng 8: 44-49, 1995.
    • (1995) IEEE Trans. Semiconductor Mfng , vol.8 , pp. 44-49
    • Cardarelli, G.1    Pelagagge, P.M.2
  • 3
    • 0010772325 scopus 로고
    • Peformances analyses for intrabay material handling automation in MOS memory production
    • Cardarelli, G., Granito, A., Pelagagge, P. M.: Peformances analyses for intrabay material handling automation in MOS memory production. Assembly Automn 13: 24-29, 1993.
    • (1993) Assembly Automn , vol.13 , pp. 24-29
    • Cardarelli, G.1    Granito, A.2    Pelagagge, P.M.3
  • 5
    • 0022914444 scopus 로고
    • The future of automation for high volume wafer fabrication and ASIC manufacturing
    • Hughes, R. A., Shott, J. D.: The future of automation for high volume wafer fabrication and ASIC manufacturing. Proc. IEEE 74:1775-1793, 1986.
    • (1986) Proc. IEEE , vol.74 , pp. 1775-1793
    • Hughes, R.A.1    Shott, J.D.2
  • 7
    • 0041530593 scopus 로고
    • Top Fabs of 1992
    • Newboe, B.: Top Fabs of 1992. Semiconductor Int. April: 50-53, 1992
    • (1992) Semiconductor Int. , vol.APRIL , pp. 50-53
    • Newboe, B.1
  • 10
    • 0042031860 scopus 로고
    • Geneva. March
    • Semicon Europa 93, Geneva. March, 1993.
    • (1993) Semicon Europa 93


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.