SCOPUS 정보 검색 플랫폼

Volumn 101, Issue 5, 2007, Pages

Dissociation of Si+ ion implanted and as-grown thin SiO2 layers during annealing in ultra-pure neutral ambient by emanation of SiO

(3) Beyer, V a Von Borany, J a Heinig, K H a

a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DISSOCIATION; ELECTRON MICROSCOPY; ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; STOICHIOMETRY;

EMANATION; HIGH TEMPERATURE ANNEALING; LOW PARTIAL PRESSURE;

SILICA;

EID: 33947432480 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2436834 Document Type: Article

Times cited : (15)

References (31)

1
- 3342922631
- 0031-9007 10.1103/PhysRevLett.55.2332
- R. Tromp, G. W. Rubloff, P. Balk, and F. K. LeGoues, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.55.2332 55, 2332 (1985).
- (1985) Phys. Rev. Lett. , vol.55 , pp. 2332
- Tromp, R.¹ Rubloff, G.W.² Balk, P.³ Legoues, F.K.⁴

2
- 0027578480
- Y. Takakuwa, M. Nihei, and N. Miyamoto, Jpn. J. Appl. Phys., Part 2 32, L480 (1993).
- (1993) Jpn. J. Appl. Phys., Part 2 , vol.32 , pp. 480
- Takakuwa, Y.¹ Nihei, M.² Miyamoto, N.³

3
- 0009186265
- 0003-6951 10.1063/1.93200
- T. Y. Tan and U. Gösele, Appl. Phys. Lett. 0003-6951 10.1063/1.93200 40, 616 (1982).
- (1982) Appl. Phys. Lett. , vol.40 , pp. 616
- Tan, T.Y.¹ Gösele, U.²

4
- 0017456928
- 0021-8979 10.1063/1.323662
- T. W. Hickmott, J. Appl. Phys. 0021-8979 10.1063/1.323662 48, 723 (1977).
- (1977) J. Appl. Phys. , vol.48 , pp. 723
- Hickmott, T.W.¹

5
- 0001244874
- 0021-8979 10.1063/1.361155
- R. A. B. Devine and D. Mathiot, J. Appl. Phys. 0021-8979 10.1063/1.361155 79, 2302 (1996).
- (1996) J. Appl. Phys. , vol.79 , pp. 2302
- Devine, R.A.B.¹ Mathiot, D.²

6
- 0021472577
- 0038-1101 10.1016/0038-1101(84)90019-4
- P. Balk, M. Aslam, and D. R. Young, Solid-State Electron. 0038-1101 10.1016/0038-1101(84)90019-4 27, 709 (1984).
- (1984) Solid-State Electron. , vol.27 , pp. 709
- Balk, P.¹ Aslam, M.² Young, D.R.³

7
- 0000789191
- 0163-1829 10.1103/PhysRevB.35.8223
- J. K. Rudra and W. B. Fowler, Phys. Rev. B 0163-1829 10.1103/PhysRevB.35. 8223 35, 8223 (1987).
- (1987) Phys. Rev. B , vol.35 , pp. 8223
- Rudra, J.K.¹ Fowler, W.B.²

8
- 49549158861
- 0038-1098 10.1016/0038-1098(74)90840-0
- F. J. Feigl, W. B. Fowler, and K. L. Yip, Solid State Commun. 0038-1098 10.1016/0038-1098(74)90840-0 14, 225 (1974).
- (1974) Solid State Commun. , vol.14 , pp. 225
- Feigl, F.J.¹ Fowler, W.B.² Yip, K.L.³

9
- 0037751775
- 0021-8979 10.1063/1.339702
- K. Hofmann, D. R. Young, and G. W. Rubloff, J. Appl. Phys. 0021-8979 10.1063/1.339702 62, 925 (1987).
- (1987) J. Appl. Phys. , vol.62 , pp. 925
- Hofmann, K.¹ Young, D.R.² Rubloff, G.W.³

10
- 0018998633
- 0001-6160 10.1016/0001-6160(80)90168-6
- G. Brebec, R. Seguin, C. Sella, J. Benevot, and J. C. Martin, Acta Metall. 0001-6160 10.1016/0001-6160(80)90168-6 28, 327 (1980).
- (1980) Acta Metall. , vol.28 , pp. 327
- Brebec, G.¹ Seguin, R.² Sella, C.³ Benevot, J.⁴ Martin, J.C.⁵

11
- 0021784345
- 0003-6951 10.1063/1.95842
- L. A. Nesbit, Appl. Phys. Lett. 0003-6951 10.1063/1.95842 46, 38 (1985).
- (1985) Appl. Phys. Lett. , vol.46 , pp. 38
- Nesbit, L.A.¹

12
- 0035875475
- 0021-8979 10.1063/1.1371003
- D. Tsoukalas, C. Tsamis, and P. Normand, J. Appl. Phys. 0021-8979 10.1063/1.1371003 89, 7809 (2001).
- (2001) J. Appl. Phys. , vol.89 , pp. 7809
- Tsoukalas, D.¹ Tsamis, C.² Normand, P.³

13
- 0037445015
- 0021-8979 10.1063/1.1554487
- T. Takahashi, S. Fukatsu, K. M. Itoh, M. Uematsu, A. Fujuwara, H. Kageshima, Y. Takahashi, and K. Shiraishi, J. Appl. Phys. 0021-8979 10.1063/1.1554487 93, 3674 (2003).
- (2003) J. Appl. Phys. , vol.93 , pp. 3674
- Takahashi, T.¹ Fukatsu, S.² Itoh, K.M.³ Uematsu, M.⁴ Fujuwara, A.⁵ Kageshima, H.⁶ Takahashi, Y.⁷ Shiraishi, K.⁸

14
- 0043011900
- 0021-8979 10.1063/1.1589168
- D. Mathiot, J. P. Schunck, M. Perego, M. Fanciulli, P. Normand, C. Tsamis, and D. Tsoukalas, J. Appl. Phys. 0021-8979 10.1063/1.1589168 94, 2136 (2003).
- (2003) J. Appl. Phys. , vol.94 , pp. 2136
- Mathiot, D.¹ Schunck, J.P.² Perego, M.³ Fanciulli, M.⁴ Normand, P.⁵ Tsamis, C.⁶ Tsoukalas, D.⁷

15
- 0344945503
- 0003-6951 10.1063/1.1625775
- S. Fukatsu, T. Takahashi, K. M. Itoh, M. Uematsu, A. Fujiwara, H. Kageshima, Y. Takahashi, K. Shiraishi, and U. Gösele, Appl. Phys. Lett. 0003-6951 10.1063/1.1625775 83, 3897 (2003).
- (2003) Appl. Phys. Lett. , vol.83 , pp. 3897
- Fukatsu, S.¹ Takahashi, T.² Itoh, K.M.³ Uematsu, M.⁴ Fujiwara, A.⁵ Kageshima, H.⁶ Takahashi, Y.⁷ Shiraishi, K.⁸ Gösele, U.⁹

16
- 0021585775
- 0003-6951 10.1063/1.95086
- J. C. Mikkelsen, Jr., Appl. Phys. Lett. 0003-6951 10.1063/1.95086 45, 1187 (1984).
- (1984) Appl. Phys. Lett. , vol.45 , pp. 1187
- Mikkelsen Jr. J., C.¹

17
- 33746378574
- 0003-6951 10.1063/1.101407
- G. K. Celler and L. E. Trimble, Appl. Phys. Lett. 0003-6951 10.1063/1.101407 54, 1427 (1989).
- (1989) Appl. Phys. Lett. , vol.54 , pp. 1427
- Celler, G.K.¹ Trimble, L.E.²

18
- 0001473887
- 0003-6951 10.1063/1.110212
- D. Tsoukalas and C. Tsamis, Appl. Phys. Lett. 0003-6951 10.1063/1.110212 63, 3167 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 3167
- Tsoukalas, D.¹ Tsamis, C.²

19
- 1542315180
- 0003-6951 10.1063/1.1644623
- M. Uematsu, H. Kageshima, Y. Takahashi, S. Fukatsu, K. M. Itoh, K. Shiraish, and U. Gösele, Appl. Phys. Lett. 0003-6951 10.1063/1.1644623 84, 876 (2004).
- (2004) Appl. Phys. Lett. , vol.84 , pp. 876
- Uematsu, M.¹ Kageshima, H.² Takahashi, Y.³ Fukatsu, S.⁴ Itoh, K.M.⁵ Shiraish, K.⁶ Gösele, U.⁷

20
- 84957282281
- 0734-2101 10.1116/1.574564
- M. Liehr, J. E. Lewis, and G. W. Rubloff, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.574564 5, 1559 (1987).
- (1987) J. Vac. Sci. Technol. A , vol.5 , pp. 1559
- Liehr, M.¹ Lewis, J.E.² Rubloff, G.W.³

21
- 21844454367
- 0168-583X 10.1016/0168-583X(84)90321-5
- W. Möller and W. Eckstein, Nucl. Instrum. Methods Phys. Res. B 0168-583X 10.1016/0168-583X(84)90321-5 2, 814 (1984).
- (1984) Nucl. Instrum. Methods Phys. Res. B , vol.2 , pp. 814
- Möller, W.¹ Eckstein, W.²

22
- 4243615182
- 0163-1829 10.1103/PhysRevB.66.045307
- A. Stesmans, B. Nouwen, and V. V. Afanas'ev, Phys. Rev. B 0163-1829 10.1103/PhysRevB.66.045307 66, 045307 (2002).
- (2002) Phys. Rev. B , vol.66 , pp. 045307
- Stesmans, A.¹ Nouwen, B.² Afanas'Ev, V.V.³

23
- 0000558192
- 0021-9606 10.1063/1.480621
- N. Mousseau, G. T. Barkema, and S. W. de Leeuw, J. Chem. Phys. 0021-9606 10.1063/1.480621 112, 960 (2000).
- (2000) J. Chem. Phys. , vol.112 , pp. 960
- Mousseau, N.¹ Barkema, G.T.² De Leeuw, S.W.³

24
- 0037158056
- 0021-9606 10.1063/1.1485730
- N. Capron and G. Boureau, J. Chem. Phys. 0021-9606 10.1063/1.1485730 117, 1843 (2002).
- (2002) J. Chem. Phys. , vol.117 , pp. 1843
- Capron, N.¹ Boureau, G.²

25
- 0034261329
- 0163-1829 10.1103/PhysRevB.62.6158
- P. Blöchl, Phys. Rev. B 0163-1829 10.1103/PhysRevB.62.6158 62, 6158 (2000).
- (2000) Phys. Rev. B , vol.62 , pp. 6158
- Blöchl, P.¹

26
- 0000241446
- 0163-1829 10.1103/PhysRevB.64.134102
- J. Song, L. R. Corrales, G. Kresse, and H. Jonsson, Phys. Rev. B 0163-1829 10.1103/PhysRevB.64.134102 64, 134102 (2001).
- (2001) Phys. Rev. B , vol.64 , pp. 134102
- Song, J.¹ Corrales, L.R.² Kresse, G.³ Jonsson, H.⁴

27
- 4243926061
- 0163-1829 10.1103/PhysRevB.66.024108
- V. B. Sulimov, P. V. Sushko, A. H. Edwards, A. L. Shluger, and A. M. Stoneham, Phys. Rev. B 0163-1829 10.1103/PhysRevB.66.024108 66, 024108 (2002).
- (2002) Phys. Rev. B , vol.66 , pp. 024108
- Sulimov, V.B.¹ Sushko, P.V.² Edwards, A.H.³ Shluger, A.L.⁴ Stoneham, A.M.⁵

28
- 0037101061
- 0021-8979 10.1063/1.1489094
- J. Dalla Torre, J. -L. Bocquet, Y. Limoge, J. -P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, J. Appl. Phys. 0021-8979 10.1063/1.1489094 92, 1084 (2002).
- (2002) J. Appl. Phys. , vol.92 , pp. 1084
- Dalla Torre, J.¹ Bocquet, J.-L.² Limoge, Y.³ Crocombette, J.-P.⁴ Adam, E.⁵ Martin, G.⁶ Baron, T.⁷ Rivallin, P.⁸ Mur, P.⁹

29
- 0022786168
- 0013-4651 10.1149/1.2109053
- T. Carlberg, J. Electrochem. Soc. 0013-4651 10.1149/1.2109053 133, 1940 (1986).
- (1986) J. Electrochem. Soc. , vol.133 , pp. 1940
- Carlberg, T.¹

30
- 0000686033
- O. Kubaschewski and T. G. Chart, J. Chem. Thermodyn. 6, 467 (1974).
- (1974) J. Chem. Thermodyn. , vol.6 , pp. 467
- Kubaschewski, O.¹ Chart, T.G.²

31
- 0036574692
- 0168-583X 10.1016/S0168-583X(02)00597-9
- B. Schmidt, D. Grambole, and F. Herrmann, Nucl. Instrum. Methods Phys. Res. B 0168-583X 10.1016/S0168-583X(02)00597-9 191, 482 (2002).
- (2002) Nucl. Instrum. Methods Phys. Res. B , vol.191 , pp. 482
- Schmidt, B.¹ Grambole, D.² Herrmann, F.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.