On the magnetic field profile in a high-power planar magnetron discharge

IEEE Transactions on Plasma Science

Volumn 33, Issue 4, 2005, Pages 1447-1449

  Abolmasov, Sergey N ^a   Bizyukov, A A ^b  

^a KYOTO UNIVERSITY   (Japan)

^b V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

Author keywords

Anomalous electron transport; Hall current; Magnetron discharge; Plasma diamagnetism

Indexed keywords

DIAMAGNETISM; ELECTRIC CURRENTS; ELECTRON TRANSPORT PROPERTIES; HALL EFFECT; MAGNETIC FIELD EFFECTS; MAGNETIC FLUX; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; PLASMA DENSITY; PLASMA DEVICES;

ANOMALOUS ELECTRON TRANSPORT; HALL CURRENT; PLANAR MAGNETRON DISCHARGE; PLASMA DIAMAGNETISM;

MAGNETRONS;

EID: 27644553903     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2005.852358     Document Type: Article

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