Magnetically induced oscillations on a conductive cantilever for resonant microsensors

Sensors and Actuators, A: Physical

Volumn 135, Issue 1, 2007, Pages 197-202

  De Angelis, C ^a   Ferrari, V ^a   Marioli, D ^a   Sardini, E ^a   Serpelloni, M ^a   Taroni, A ^a  

^a UNIVERSITY OF BRESCIA   (Italy)

Author keywords

Autonomous sensors; Magnetic activation; Resonant sensors

Indexed keywords

CANTILEVER BEAMS; CMOS INTEGRATED CIRCUITS; MAGNETIC FIELD EFFECTS; MEMS; PIEZOELECTRIC ACTUATORS;

AUTONOMOUS SENSORS; MAGNETIC ACTIVATION; RESONANT SENSORS; TIME VARIABLE MAGNETIC FIELD;

MICROSENSORS;

EID: 33947243979     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.06.049     Document Type: Article

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