Design, fabrication and vapor characterization of a microfabricated flexural plate resonator sensor and application to integrated sensor arrays

Sensors and Actuators, B: Chemical

Volumn 73, Issue 2-3, 2001, Pages 112-123

  Cunningham, Brian ^a,b   Weinberg, Marc ^a   Pepper, Jane ^a,b   Clapp, Chris ^a   Bousquet, Rob ^a   Hugh, Brenda ^a   Kant, Richard ^c   Daly, Chris ^c   Hauser, Eric ^c  

^a CHARLES STARK DRAPER LABORATORY   (United States)

^b SRU Biosystems   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; DAMPING; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; PLASTIC COATINGS; PLASTIC FILMS; RESONANCE; RESONATORS; SEMICONDUCTING SILICON; THERMAL EFFECTS; VAPORS;

FLEXURAL PLATE RESONATOR SENSORS; FLEXURAL PLATE WAVES;

CHEMICAL SENSORS;

EID: 0034817969     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(00)00664-X     Document Type: Article

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