Future of microelectromechanical systems (MEMS)

Sensors and Actuators, A: Physical

Volumn 56, Issue 1-2, 1996, Pages 135-141

  Bao, Minhang ^a   Wang, Weiyuan ^b  

^a FUDAN UNIVERSITY   (China)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Microelectromechanical systems

Indexed keywords

MICROELECTRONICS; MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON SENSORS;

SOLID STATE SENSORS; TWO DIMENSIONAL PROCESSING TECHNOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0030206016     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01274-5     Document Type: Article

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