Resonant magnetic field microsensors in standard CMOS technology

Conference Record - IEEE Instrumentation and Measurement Technology Conference

Volumn 1, Issue , 1999, Pages 452-457

  Baglio, Salvatore ^a   Latorre, Laurent ^a   Nouet, Pascal ^a  

^a UNIVERSITY OF CATANIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; MAGNETIC FIELD MEASUREMENT; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES;

RESONANT MAGNETIC FIELD MICROSENSORS;

MICROSENSORS;

EID: 0032625155     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)