On-chip 2-axis optical fiber actuator using gray-scale technology

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 266-269

  Morgan, Brian ^a   Ghodssi, Reza ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE MATERIALS; DRY ETCHING; LITHOGRAPHY; OPTICAL FIBERS; OPTOELECTRONIC DEVICES; PRODUCT DESIGN; SILICON; THREE DIMENSIONAL;

COMB DRIVE ACTUATORS; FIBER CANTILEVER; GRAY SCALE TECHNOLOGY; VARIABLE HEIGHT;

ACTUATORS;

EID: 33646727482     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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