Automated optical fiber alignment in 2-axes using 3d shaped actuators

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 70-73

  Morgan, Brian ^a   Ghodssi, Reza ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT; AUTOMATION; ELECTROSTATIC ACTUATORS; III-V SEMICONDUCTORS; INDIUM PHOSPHIDE; MICROSYSTEMS; OPTICAL FIBERS; SEMICONDUCTING INDIUM PHOSPHIDE; SILICON WAFERS;

ALIGNMENT ALGORITHMS; ELECTROSTATIC COMB DRIVES; FIBER ALIGNMENT; GRAY-SCALE TECHNOLOGY; ON CHIPS; TARGET LOCATION;

SOLID-STATE SENSORS;

EID: 33947214939     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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