A model for stress in thin layers induced by misfitting particles: An origin for growth stress

Thin Solid Films

Volumn 317, Issue 1-2, 1998, Pages 169-172

  Kamminga, J D ^a   De Keijser, Th H ^a   Delhez, R ^a   Mittemeijer, E J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Particles; Stress; Thin layers

Indexed keywords

MAGNETRON SPUTTERING; MATHEMATICAL MODELS; STRESSES; SUBSTRATES; TITANIUM NITRIDE;

STRESS MEASUREMENT; THIN LAYER; TITANIUM NITRIDE FILM;

THIN FILMS;

EID: 0032045631     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00614-7     Document Type: Article

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