Design and fabrication of tungsten carbide mould with micro patterns imprinted by micro lithography

Journal of Micromechanics and Microengineering

Volumn 14, Issue 11, 2004, Pages 1519-1525

  Choi, Woojae ^a   Lee, Jayong ^a   Kim, Wook Bae ^a   Min, Byung Kwon ^a   Kang, Shinill ^a   Lee, Sang Jo ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; GRAIN SIZE AND SHAPE; LITHOGRAPHY; MICROMACHINING; OPTICAL COMMUNICATION; OPTICAL DATA STORAGE; OPTICAL DEVICES; PHOTORESISTS;

DIAMOND TURNING MACHINES (DTM); MICRO PATTERNS; REACTIVE ION ETCHING (RIE); SURFACE QUALITIES;

TUNGSTEN;

EID: 9744221909     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/11/012     Document Type: Article

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