Analogous micro-optical components fabricated using excimer laser ablation

Tamkang Journal of Science and Engineering

Volumn 6, Issue 3, 2003, Pages 145-150

  Yang, Hsiharng ^a   Pan, Cheng Tang ^b  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Excimer laser; MEMS; Microlens; Micromachining

Indexed keywords

EXCIMER LASER MACHINING; LASER ENERGIES; LOW ASPECT RATIO; MACHINING EXPERIMENTS; MICRO-LENS; MICRO-OPTICAL COMPONENTS; NUMERICAL SIMULATION; REPETITION RATE; SIMULATION TECHNIQUE;

ASPECT RATIO; COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; GAS LASERS; LASER ABLATION; LASER APPLICATIONS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROLENSES; MICROMACHINING; MICROSTRUCTURE; SURFACE ROUGHNESS;

EXCIMER LASERS;

EID: 27944465576     PISSN: 15606686     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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