Effect of pore generating materials on the electrical and mechanical properties of porous low-k films

Macromolecular Research

Volumn 15, Issue 1, 2007, Pages 1-4

  Kim, Suhan ^a   Char, Kookheon ^a   Hahn, Junhee ^b   Lee, Jin Kyu ^a   Yoon, Do Yeung ^a   Rhee, Hee Woo ^c   Jin, Moon Young ^d  

^a Seoul National University   (South Korea)

^b Korea Research Institute of Standards and Science   (South Korea)

^c Sogang University   (South Korea)

^d Korea Research Institute of Chemical Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33847743399     PISSN: 15985032     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF03218744     Document Type: Article

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