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Volumn 2005, Issue , 2005, Pages 44-48

Voltage acceleration of oxide breakdown in the sub-10 nm Fowler-Nordheim and direct tunneling regime

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; ELECTRON TUNNELING; FIELD EFFECT TRANSISTORS; MATHEMATICAL MODELS;

EID: 33847710715     PISSN: 19308841     EISSN: 23748036     Source Type: Conference Proceeding    
DOI: 10.1109/IRWS.2005.1609560     Document Type: Conference Paper
Times cited : (11)

References (16)
  • 7
    • 3342944532 scopus 로고    scopus 로고
    • Complementary model for intrinsic time-dependent dielectric breakdown in SiO2 dielectrics
    • J.W. McPherson et al., "Complementary model for intrinsic time-dependent dielectric breakdown in SiO2 dielectrics" Journal of Applied Physics, vol. 88, no 9, pp. 5351-535 (2000)
    • (2000) Journal of Applied Physics , vol.88 , Issue.9 , pp. 5351-5535
    • McPherson, J.W.1
  • 9
    • 17344378427 scopus 로고    scopus 로고
    • Voltage-dependent voltage-acceleration of oxide breakdown for ultra-thin oxides
    • E.Y. Wu et al., "Voltage-dependent voltage-acceleration of oxide breakdown for ultra-thin oxides" Technical Digest of the 2000 International Electron Device Meeting, 2000, pp. 541-544 (2000)
    • (2000) Technical Digest of the 2000 International Electron Device Meeting , pp. 541-544
    • Wu, E.Y.1
  • 10
    • 11144226784 scopus 로고    scopus 로고
    • Hydrogen-release mechanism in the breakdown of thin SiO2 films
    • J. Sune et al., "Hydrogen-release mechanism in the breakdown of thin SiO2 films", Physical Review Letters, vol. 92, no.8 pp. 87601-4(2004)
    • (2004) Physical Review Letters , vol.92 , Issue.8 , pp. 87601-87604
    • Sune, J.1
  • 11
    • 21644438191 scopus 로고    scopus 로고
    • Modeling charge to breakdown using hydrogen multi-vibrational excitation (thin SiP2 and high-k dielectrics)
    • G. Ribes et al., "Modeling charge to breakdown using hydrogen multi-vibrational excitation (thin SiP2 and high-k dielectrics)", in Proceedings of 2004 IEEE International Integrated Reliability Workshop, pp. 1-3 (2004)
    • (2004) Proceedings of 2004 IEEE International Integrated Reliability Workshop , pp. 1-3
    • Ribes, G.1
  • 15
    • 27744451545 scopus 로고    scopus 로고
    • Multi-Vibrational Hydrogen Release: Physical Origin of TBD, QBD Power-Law Voltage Dependence of Oxide Breakdown in ultra-thin Gate Oxides
    • in press, available online
    • G. Ribes et al., "Multi-Vibrational Hydrogen Release: Physical Origin of TBD, QBD Power-Law Voltage Dependence of Oxide Breakdown in ultra-thin Gate Oxides", Microelectronics Reliability, in press, available online (2005)
    • (2005) Microelectronics Reliability
    • Ribes, G.1
  • 16
    • 28744446900 scopus 로고    scopus 로고
    • Universality of Power-Law Voltage dependence for TDDB Lifetime in Thin Gate Oxide PMOSFETs
    • K. Ohgata et al., "Universality of Power-Law Voltage dependence for TDDB Lifetime in Thin Gate Oxide PMOSFETs", in Proceedings of 2005 IEEE International Reliability Physics Symposium, pp. 372-376 (2005)
    • (2005) Proceedings of 2005 IEEE International Reliability Physics Symposium , pp. 372-376
    • Ohgata, K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.