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Volumn 20, Issue 1, 2007, Pages 26-38

Errors associated with light-pipe radiation thermometer temperature measurements

Author keywords

Error; Light pipe; Radiation thermometer; Temperature measurement

Indexed keywords

NONSPECULAR REFLECTION; RADIATION THERMOMETER; SURFACE TEMPERATURE DISTRIBUTION; WAFER RADIOSITY;

EID: 33847703747     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2007.890772     Document Type: Article
Times cited : (11)

References (15)
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  • 4
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    • Comparison of silicon wafer temperature measurements using thin film thermocouples and lightpipe radiation thermometers in a thermometry test bed
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    • K. S. Ball and G. Y. Tan, "Comparison of silicon wafer temperature measurements using thin film thermocouples and lightpipe radiation thermometers in a thermometry test bed," in Proc. 10th IEEE Int. Conf. Advanced Thermal Processing of Semiconductors (RTP 2002), Vancouver, Canada.
    • Proc. 10th IEEE Int. Conf. Advanced Thermal Processing of Semiconductors (RTP 2002)
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    • Feb
    • D. J. Frankman, B. W. Webb, and M. R. Jones, "Investigation of lightpipe volumetric radiation effects in RTP thermometry," J. Heat Transfer, vol. 128, no. 2, pp. 132-141, Feb. 2006.
    • (2006) J. Heat Transfer , vol.128 , Issue.2 , pp. 132-141
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  • 10
    • 33847737145 scopus 로고    scopus 로고
    • Y. Qu, Silicon Wafer Surface Temperature Measurement Using Light-Pipe Radiation Thermometers in Rapid Thermal Processing Systems, Ph.D. Dissertation, Mechanical Engineering Dept., Univ. of Texas at Austin, Austin, TX, 2006.
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  • 15
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    • Comparison of the Beckman model with bidirectional reflectance measurements
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.