Effects of thermal environment and surface roughness on LPRT surface temperature measurements

Collection of Technical Papers - 9th AIAA/ASME Joint Thermophysics and Heat Transfer Conference Proceedings

Volumn 3, Issue , 2006, Pages 2102-2110

  Puttitwong, Ekachai ^a,b,c   Qu, Yan ^a,b,c   Howel, John R ^a   Ezekoye, Ofodike A ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^b Mechanical Engineering Department   (United States)

^c AIAA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT PIPE PROBE; LIGHT PIPE RADIATION THERMOMETERS (LPRT); RAPID THERMAL PROCESSING (RTP); SEMICONDUCTOR MANUFACTURING;

COMPUTATION THEORY; MONTE CARLO METHODS; SENSORS; SURFACE ROUGHNESS; TEMPERATURE MEASUREMENT;

SURFACE STRUCTURE;

EID: 33845513100     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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