The UT/NIST/SA/ISMT Thermometry Test Bed - 2001

9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001

Volumn , Issue , 2001, Pages 149-162

  Ball, K S ^a   Huston, K S ^a   Noska, B L ^a   Simonich, M A ^a   Geyling, F T ^b   Sing, D ^b   Tichy, R S ^b   Bharav, Y ^c  

^a The University of Texas at Austin   (United States)

^b SEMATECH   (United States)

^c CI Systems (CI Semi Division)   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EQUIPMENT TESTING; HEAT TREATMENT; PYROMETERS; PYROMETRY; SILICON WAFERS; THERMAL CONDUCTIVITY; THERMOCOUPLES; THERMOMETERS;

COMMERCIAL SENSORS; INTERNATIONAL SEMATECH; JOINT PROJECTS; NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY; PROGRESS REPORT; TEMPERATURE STANDARD; THIN FILM THERMOCOUPLE; UNIVERSITY OF TEXAS;

TEMPERATURE SENSORS;

EID: 84983197489     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RTP.2001.1013760     Document Type: Conference Paper

References (2)

1. Geyling, F., Van Eck, B., Ball, K.S., Powers, B., Blakeney, J., "The UT/NIST/SA/ISMT Thermometry Test Bed," in Proceedings of the 8th International Conference on Advanced Thermal Processing of Semiconductors - RTP 2000, edited by D. P. DeWitt, J. Kowalski, B. Lojek, and A. Tillmann (RTP-Conference, Colorado Springs, Colorado, 2000), pp. 74-82.
2. Kreider, K.G., DeWitt, D.P., Meyer, C.W., and Scheuerman, V.P., "Calibration of Lightpipe Radiation Thermometers in a RTP Tool at 1000°C," in Proceedings of the 8th International Conference on Advanced Thermal Processing of Semiconductors - RTP 2000, edited by D. P. DeWitt, J. Kowalski, B. Lojek, and A. Tillmann (RTP-Conference, Colorado Springs, Colorado, 2000), pp. 64-70.