Temperature measurement issues in rapid thermal processing

Materials Research Society Symposium - Proceedings

Volumn 470, Issue , 1997, Pages 3-15

  DeWitt, D P ^a   Sorrell, F Y ^a   Elliott, J K ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT RADIATION; OPTICAL PROPERTIES; SURFACE ROUGHNESS; TEMPERATURE MEASUREMENT; THERMODYNAMIC PROPERTIES;

RAPID THERMAL PROCESSING;

RADIOMETRY;

EID: 0031357584     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-470-3     Document Type: Conference Paper

References (37)