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Volumn , Issue , 2002, Pages 75-
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Comparison of silicon wafer temperature measurements using thin film thermocouples and lightpipe radiation thermometers in a thermometry test bed
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Author keywords
[No Author keywords available]
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Indexed keywords
CALIBRATION;
EQUIPMENT TESTING;
HEAT TREATMENT;
PYROMETERS;
PYROMETRY;
TEMPERATURE MEASUREMENT;
TEMPERATURE SENSORS;
THERMAL CONDUCTIVITY;
THERMOCOUPLES;
THERMOMETERS;
THIN FILMS;
COMPARISON MEASUREMENT;
INTERNATIONAL SEMATECH;
NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY;
RADIATION THERMOMETERS;
TEMPERATURE MEASURING SYSTEM;
TEMPERATURE UNIFORMITY;
THERMOCOUPLE CALIBRATION;
THIN FILM THERMOCOUPLE;
SILICON WAFERS;
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EID: 84962374921
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/RTP.2002.1039442 Document Type: Conference Paper |
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Times cited : (3)
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References (0)
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