Drawdown-effect of lightpipes in silicon wafer surface temperature measurements

Proceedings of the ASME Summer Heat Transfer Conference

Volumn 4, Issue , 2005, Pages 193-198

  Qu, Yan ^a   Puttitwong, Ekachai ^a   Howell, John R ^a   Ezekoye, Ofodike A ^a   Ball, Kenneth S ^b  

^a The University of Texas at Austin   (United States)

^b VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERNATIONAL TEMPERATURE STANDARD (ITS); LIGHTPIPE RADIATION THERMOMETERS (LPRTS);

HEAT RADIATION; SILICON WAFERS; STANDARDS; THERMOMETERS;

TEMPERATURE MEASUREMENT;

EID: 29644433530     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/HT2005-72203     Document Type: Conference Paper

References (10)

1. Perkins, R.H., Riley, T.J., Gyurcsik, Ronald S., "Thermal Uniformity and Stress Minimization during Rapid Thermal Processes", IEEE Transactions on Semiconductor Manufacturing, Vol. 8, No. 3, 1995, p. 272.
2. Ball, K.S., Huston, K.S., Noska, B.L., Simonich, M.A., Geyling, F.T., Sing, D., Tichy, R.S., Baharav, Y., "The UT/NIST/SA/ISMT Thermometry Test Bed - 2001", 9th International Conference on Advanced Thermal Processing of Semiconductors- RTP 2001, edited by D.P.Dewitt et al. (RTP conference, Colorado spring, Coloralo, 2001), pp.149-162.
3. Ball, K.S., Tan, G.Y., "Comparison of silicon wafer temperature measurements using thin film thermocouples and lightpipe radiation thermometers in a thermometry test bed", 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors- RTP 2002.
4. th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP2004, Portland, OR, pp.175-180.
5. Gamba, M., Erturk, H., Ezekoye, O.A., and Howell, J. R., 2002, "Modeling of a Radiation RTP-Type Furnace Through Inverse Design: Mathematical Model and Experimental Results," Proc. IMECE2002, ASME International Mechanical Engineering Congress & Exposition, New Orleans LA, November 2002, IMECE2002-33844.
6. Frankman, D.J., Webb, B.W., and Jones, M.R., 2004, "Investigation of Volumetric Radiation Effects in Lightpipe Thermometry," in Proceedings of the 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP2004, edited by J. Gelpey, B. Lojek, Z. Nenyei, and R. Singh, pp. 195-202.
7. Siegel, R. and Howell, J.R., "Thermal Radiation Heat Transfer" 4th ed, 2002.
8. http://www.efunda.com/materials/elements/
9. http://www.gequartz.com/en/thermal.htm
10. th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP 2003, pp. 125-129.