Fabrication of ultrathin magnetic structures by nanostencil lithography in dynamic mode

Applied Physics Letters

Volumn 90, Issue 9, 2007, Pages

  Gross, L ^a   Schlittler, R R ^a   Meyer, G ^a   Vanhaverbeke, A ^a   Allenspach, R ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; NANOSTRUCTURED MATERIALS;

EDGE PROFILE WIDTHS; MAGNETIC ELEMENTS; NANOSTENCIL LITHOGRAPHY; ULTRATHIN MAGNETIC STRUCTURES;

MAGNETIC STRUCTURE;

EID: 33847656522     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2710202     Document Type: Article

References (17)

1. K. Ono, H. Shimada, S. I. Kobayashi, and Y. Ootuka, Jpn. J. Appl. Phys., Part 1 35, 2369 (1996).
2. R. Allenspach, A. Bischof, M. Stampanoni, D. Kerkmann, and D. Pescia, Appl. Phys. Lett. 60, 1908 (1992).
3. M. M. Deshmukh, D. C. Ralph, M. Thomas, and J. Silcox, Appl. Phys. Lett. 75, 1631 (1999).
4. A. R. Champagne, A. J. Couture, F. Kuemmeth, and D. C. Ralph, Appl. Phys. Lett. 82, 1111 (2003).
5. P. Zahl, M. Bammerlin, G. Meyer, and R. R. Schlittler, Rev. Sci. Instrum. 76, 023707 (2005).
6. S. Egger, A. Ilie, Y. Fu, J. Chongsathien, D.-J. Kang, and M. E. Welland, Nano Lett. 5, 15 (2005).
7. S. Egger, S. Higuchi, and T. Nakayama, J. Comb. Chem. 8, 275 (2006).
8. R. Lüthi, R. R. Schlittler, J. Brugger, P. Vettiger, M. E. Welland, and J. K. Gimzewski, Appl. Phys. Lett. 75, 1314 (1999).
9. Z. Racz, J. He, S. Srinivasan, W. Zhao, A. Seabaugh, K. Han, P. Ruchhoeft, and J. Wolfe, J. Vac. Sci. Technol. B 22, 74 (2004).
10. J. Köhler, M. Albrecht, C. R. Musil, and E. Bucher, Physica E (Amsterdam) 4, 196 (1999).
11. M. A. F. van den Boogaart, G. M. Kim, R. Pellens, J.-P. van den Heuvel, and J. Brugger, J. Vac. Sci. Technol. B 22, 3174 (2004).
12. K. Koike, H. Matsuyama, and K. Hayakawa, Scanning Microsc. Suppl. 1, 241 (1987).
13. G. G. Hembree, J. Unguris, R. J. Celotta, and D. T. Pierce, Scanning Microsc. Suppl. 1, 229 (1987).
14. P.-O. Jubert, R. Allenspach, and A. Bischof, Phys. Rev. B 69, 220410 (R) (2004).
15. M. Kölbel, R. W. Tjerkstra, J. Brugger, C. J. M. van Rijn, W. Nijdam, J. Huskens, and D. N. Reinhoudt, Nano Lett. 2, 1339 (2002).
16. M. A. F. van den Boogaart, M. Lishchynska, L. M. Doeswijk, J. C. Greer, and J. Brugger, Sens. Actuators, A 130-131, 568 (2006).
17. S. P. Li, W. S. Lew, J. A. C. Bland, L. Lopez-Diaz, M. Natali, C. A. F. Vaz, and Y. Chen, Nature (London) 415, 600 (2002).