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note
-
This report focuses only on structures entirely fabricated in UHV, but some of the described strategies could be adapted for studies on films previously grown ex situ, in a top-contacted FET-type geometry.
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EGC04, Oxford Applied Research, UK.
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EGC04
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33744496121
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Inficon, U.S.A.
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XTM/2, Inficon, U.S.A.
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XTM/2
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33744475178
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Agar Scientific, UK
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Athene Old 200, Agar Scientific, UK. (Two grids were combined to decrease the square aperture size to 60 μm.)
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Athene Old 200
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20
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PI, Germany
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UHVL-025
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23
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33744480070
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note
-
When describing the sample/mask relative motions during structure fabrication, we treat the sample substrate as static, but in the actual setup, the sample is moved, and the fine-patterned mask is kept in a fixed position.
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24
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33744475178
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Agar Scientific, UK
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Athene Old 200, Agar Scientific, UK. (Two grids were combined to decrease the square aperture size to 60 μm.)
-
Athene Old 200
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25
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0001449316
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33744461640
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Nanosurf, Switzerland
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EasyPLL plus, Nanosurf, Switzerland.
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EasyPLL Plus
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