Nonlinear dynamics of vibrating MEMS

Sensors and Actuators, A: Physical

Volumn 134, Issue 1, 2007, Pages 98-108

  Braghin, Francesco ^a   Resta, Ferruccio ^a   Leo, Elisabetta ^a   Spinola, Guido ^b  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

Lumped parameter model; MEMS gyroscope; Nonlinear dynamics

Indexed keywords

CIRCUIT RESONANCE; DYNAMICS; GYROSCOPES; MATHEMATICAL MODELS; NONLINEAR SYSTEMS; VIBRATION CONTROL;

LUMPED PARAMETER MODEL; PARAMETER MODEL; RESONANCE PEAK;

MICROELECTROMECHANICAL DEVICES;

EID: 33847298046     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.10.041     Document Type: Article

References (16)

1. Iyer S., Zhou Y., and Mukherjee T. Analytical modelling of cross-axis coupling in micromechanical springs. Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems MSM99. Pittsburgh, USA (1999)
2. K.Y. Yasumura, Energy dissipation mechanisms in microcantilever oscillators with applications to the detection of small forces, PhD Thesis, Stanford University USA, 2001.
3. Liu R., Paden B., and Turner K. MEMS resonators that are robust to process-induced feature width variations. J. Microelectromech. Syst. 11 5 (2002) 505-511
4. Kaajakari V., Mattila T., Lipsanen A., and Oja A. Nonlinear mechanical effects in silicon longitudinal mode beam resonators. Sens. Actuators A 120 1 (2005) 64-70
5. Zhang W., Baskaran R., and Turner K.L. Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor. Sens. Actuators A 102 (2002) 139-150
6. Wang C., Liu D., Rosing R., Richardson A., and De Masi B. Construction of nonlinear dynamic MEMS component models using Cosserat theory. Analog Integrated Circuits Signal Process. 40 2 (2004) 117-130
7. Pai P.F. Linear and Nonlinear Structual Mechanics (2004), John Wiley Interscience, New York
8. Hosaka H., Itao K., and Kuroda S. Damping characteristics of beam-shaped micro-oscillators. Sens. Actuators A 49 (1995) 87-95
9. Reid S., Cagnoli G., Crooks D.R.M., Hough J., Murray P., Rowan S., Fejer M.M., Route R., and Zappe S. Mechanical dissipation in silicon flexures. Proceedings of the 22nd Texas Symposium on Relativistic Astrophysics at Stanford University. Glasgow, UK, December 13-17 (2004)
10. Yasumura K.Y., Stowe T.D., Chow E.M., Pfafman T., Kenny T.W., Stipe B.C., and Rugar D. Quality factors in micron- and submicron-thick cantilevers. J. Microelectromech. Syst. 9 1 (2000) 117-125
11. Hutcherson S., and Ye W. On the squeeze-film damping of microresonators in the free-molecule regime. J. Micromech. Microeng. 14 (2004) 1726-1733
12. Miralles J.P., Jiménez Olivo P.J., and Peirò D.G. A fast Galerkin method to obtain the periodic solutions of a nonlinear oscillator. Appl. Math. Comput. 86 (1997) 261-282
13. Nayfeh A.H., and Younis M.I. Dynamics of MEMS resonators under superharmonic and subharmonic excitations. J. Micromech. Microeng. 15 (2005) 1840-1847
14. Braghin F., Leo E., and Resta F. Estimation of the damping in MEMS inertial sensors: comparison between numerical and experimental results both at high and low pressure level. Proceedings of ESDA2006 8th Biennial ASME Conference on Engineering Systems Design and Analysis. Torino, Italy, July 4-7 (2006)
15. D.J. Ewins, Modal Testing: Theory, Practice and Application.
16. Braghin F., Leo E., and Resta F. Numerical and experimental analysis of a nonlinear vibrating MEMS. Proceedings of IMECE2005 ASME International Mechanical Engineering Congress and Exposition. Orlando, November 5-11 (2005)