Numerical and experimental analysis of a nonlinear vibrating MEMS

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 253-261

  Braghin, Francesco ^a   Leo, Elisabetta ^a   Resta, Ferruccio ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

NONLINEAR HARDENING CHARACTERISTIC; NONLINEAR VIBRATING MEMS; RESONANCE PEAK;

BEAMS AND GIRDERS; BENDING (DEFORMATION); DYNAMIC RESPONSE; GYROSCOPES; NONLINEAR SYSTEMS; RESONANCE; VIBRATIONS (MECHANICAL);

MICROELECTROMECHANICAL DEVICES;

EID: 33645989778     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-81014     Document Type: Conference Paper

References (5)

1. Sitaraman I., Yong Z., Tamal M., Analytical Modelling of Cross-Axis Coupling in Micromechanical Springs, Carnegie Mellon University, Pittsburgh
2. Hosaka H., Itao K., Kuroda S., Damping Characteristics of Beam-Shaped Micro-Oscillators, Sensors and Actuators A, Vol. 49, 1995, pp.: 87-95
3. Miralles J.P., Jiménez Olivo P.J. Peirò D.G., A Fast Galerkin Method to Obtain the Periodic Solutions of a Nonlinear Oscillator, Applied Mathematics and Computation, Vol. 86, 1997, pp.: 261-282
4. S.Adams, F. Bertsch, N.C.MacDonald. Indipendent tuning of the lenear and nonlinear stiffness coefficients of a micromechanical device. IEEE 1996.
5. Meirovitch. Fundamentals of Vibrations