Construction of nonlinear dynamic MEMS component models using cosserat theory

Analog Integrated Circuits and Signal Processing

Volumn 40, Issue 2, 2004, Pages 117-130

  Wang, C ^a   Liu, D ^a   Rosing, R ^a   De Masi, B ^b   Richardson, A ^a  

^a LANCASTER UNIVERSITY   (United Kingdom)

^b STMICROELECTRONICS   (Italy)

Author keywords

Component modelling; Cosserat dynamics; MEMS

Indexed keywords

CODES (SYMBOLS); COMPUTER SIMULATION; DEFLECTION (STRUCTURES); DEGREES OF FREEDOM (MECHANICS); KINEMATICS; STIFFNESS; STRESS ANALYSIS; STRUCTURAL ANALYSIS;

COMPONENT MODELING; COSSERAT DYNAMICS; MODULARIZATION; NONLINEAR BEHAVIOR;

MICROELECTROMECHANICAL DEVICES;

EID: 3142709557     PISSN: 09251030     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:ALOG.0000032593.34671.fa     Document Type: Conference Paper

References (9)

1. G. Lorenz and R. Neul, "Network-type modeling of micromachined sensor systems." In Proc. of the MSM, Santa Clara, April 1998, pp. 233-238.
2. T. Mukherjee, G.K. Fedder, and R.D. Blanton, "Hierarchical design and test of integrated microsystems." IEEE Design and Test of Computers, vol. 16, no. 4, pp. 18-27, 1999.
3. CoventorWare of Coventor Inc. http://www.coventor.com.
4. MEMSMaster of MEMSCAP, http://www.memscap.com.
5. B. Librovich, R.W Tucker, and C. Wang, "On gear modelling in multistage rotary vane engines." Meccanica, to appear in, 2003.
6. R.W. Tucker and C. Wang, "Torsional vibration control and cosserat dynamics of a drill-rig assembly." Meccanica, vol. 38 pp. 143-159, 2003.
7. A. Balanov, N. Janson, P.V.E. McClintock, R.W. Tucker, and C. Wang, "Bifurcation analysis of a neutral delay differential equation modelling the torsional motion of a driven drill string." Chaos, Solitons and Fractals, vol. 15, pp. 381-394, 2003.
8. R. Rosing, C. Wang, R. Tucker, A. Richardson, and B. De Masi, "Generation of MEMS component models using Cosserat symbolic simulations." In Proc. of SPIE DTIP Symposium, Cannes Mandelieu, France, May 5-8, 2002, pp. 149-154.
9. C. Wang, D. Liu, R. Rosing, A. Richardson, and B. De Masi, "Construction of nonlinear dynamic MEMS component models using Cosserat theory." In Proceedings of Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Cannes Mandelieu, France, May 5-7 2003, pp. 131-136.