Modal analysis of a unimorph piezoelectrical transducer

Microsystem Technologies

Volumn 9, Issue 6-7, 2003, Pages 474-479

  Liu, C ^a   Cui, T ^a   Zhou, Z ^b  

^a LOUISIANA TECH UNIVERSITY   (United States)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; MACHINE DESIGN; MACHINE VIBRATIONS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MODAL ANALYSIS;

VIBRATION MODES;

PIEZOELECTRIC TRANSDUCERS;

EID: 0242412373     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0277-4     Document Type: Review

References (9)

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