Design of diffusion barriers

Thin Solid Films

Volumn 515, Issue 11, 2007, Pages 4794-4800

  Gill, William N ^a   Plawsky, Joel L ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Diffusion barriers; Interlayer dielectric

Indexed keywords

DIFFUSION; ELECTRIC RESISTANCE; LINEAR SYSTEMS; SEMICONDUCTOR MATERIALS; SOLUBILITY; SUBSTRATES;

DIFFUSION BARRIERS; GEOMETRICAL PROPERTIES; INTERLAYER DIELECTRIC; METAL DIFFUSION;

DIELECTRIC MATERIALS;

EID: 33847173819     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.153     Document Type: Article

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