Synthesis and characterization of nanocrystalline ZrNxOy thin films on Si by ion plating

Surface and Coatings Technology

Volumn 201, Issue 14, 2007, Pages 6404-6413

  Huang, Jia Hong ^a   Chang, Kai Hsuan ^a   Yu, Ge Ping ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Ion plating; Nanocrystalline; Oxygen content; Phase separation; ZrNxOy

Indexed keywords

CHARACTERIZATION; NANOCRYSTALLINE MATERIALS; PHASE SEPARATION; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM COMPOUNDS;

FILM PROPERTIES; ION PLATING; OXYGEN CONTENT; SILICON SUBSTRATES;

PLATING;

CHARACTERIZATION; NANOCRYSTALLINE MATERIALS; PHASE SEPARATION; PLATING; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM COMPOUNDS;

EID: 33847055793     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.12.007     Document Type: Article

References (28)

1. Fraunchy R. Surf. Sci. Rep. 38 (2000) 195
2. Ohring M. The Materials Science of Thin Films (1992), Academic Press Inc., San Diego 511
3. Vaz F., Cerqueira P., Rebouta L., Nascimento S.M.C., Alves E., Goudeau Ph., Riviere J.P., Pischow K., and de Rijk J. Thin Solid Films 447-448 (2004) 449
4. Zega B. Surf. Coat. Technol. 39/40 (1989) 507
5. Mitterer C., Komenda-Stallmaier J., Losbichler P., Schmolz P., Werner W.S.M., and Stori H. Vaccum 46 (1995) 1281
6. Chappe J.-M., Martin N., Terwagne G., Lintymer J., Gavoille J., and Takadoum J. Thin Solid Films 440 (2003) 66
7. Cunha L., Vaz F., Moura C., Rebouta L., Carvalho P., Alves E., Cavaleiro A., Goudeau Ph., and Riviere J.P. Surf. Coat. Technol. 200 (2006) 2917
8. Vaz F., Cerqueira P., Rebouta L., Nascimento S.M.C., Alves E., Goudeau Ph., Riviere J.P., Pischow K., and de Rijk J. Thin Solid Films 447-448 (2004) 449
9. Martin N., Sanjines R., Takadoum J., and Levy F. Surf. Coat. Technol. 142-144 (2001) 615
10. Vaz F., Cerqueira P., Rebouta L., Nascimento S.M.C., Alves E., and Ph. Goudeau J.P. Surf. Coat. Technol. 174-175 (2003) 197
11. Vaz F., Cerqueira P., Rebouta L., Nascimento S.M.C., Alves E., Goudeau Ph., Riviere J.P., Pischow K., and de Rijk J. Thin Solid Films 447-448 (2004) 449
12. Carvalho P., Vaz F., Rebouta L., Carvalho S., Cunha L., Goudeau Ph., Riviere J.P., Alves E., and Cavaleiro A. Surf. Coat. Technol. 200 (2005) 748
13. Ariza E., Rocha L.A., Vaz F., Cunha L., Ferreira S.C., Carvalho P., Rebouta L., Alves E., Goudeau Ph., and Riviere J.P. Thin Solid Films 469-470 (2004) 274
14. Martin N., Banakh O., Santo A.M.E., Springer S., Sanjines R., Takadoum J., and Levy F. Appl. Surf. Sci. 185 (2001) 123
15. Makino Y., Nose M., Tanaka T., Misawa M., Tanimoto A., Nakai T., Kato K., and Nogi K. Surf. Coat. Technol. 98 (1998) 934
16. Vaz F., Carvalho P., Cunha L., Rebouta L., Moura C., Alves E., Ramos A.R., Cavaleiro A., Goudeau Ph., and Riviere J.P. Thin Solid Films 469-470 (2004) 11
17. Jung M.J., Nam K.H., Chung Y.M., Boo J.H., and Han J.G. Surf. Coat. Technol. 171 (2003) 71
18. Ensinger W., and Muller H.R. Surf. Coat. Technol. 163-164 (2003) 281
19. Hultman L. Vacuum 57 (2000) 1
20. Ensinger W., Schroer A., and Wolf G.K. Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 80/81 (1993) 445
21. Jia-Hong Huang, Chi-Hsin Ho, Ge-Ping Yu, Mater. Chem. Phys. (in press), doi:10.1016/j.matchemphys.2006.10.007.
22. Chou W.-J., Sun C.-H., Yu G.-P., and Huang J.-H. Mater. Chem. Phys. 82 (2003) 228
23. Scherrer P. Gött. Nachr 2 (1918) 98
24. Ma C.-H., Huang J.-H., and Chen H. Thin Solid Films 418 (2002) 73
25. Oliver W.C., and Pharr G.M. J. Mater. Res. 7 (1992) 1564
26. Stoney G.G. Proc. R. Soc. Lond., A 82 (1909) 172
27. Huang J.-H., Yang H.-C., Guo X.-J., and Yu G.-P. Surf. Coat. Technol. 195 (2005) 204
28. Ma C.-H., Huang J.-H., and Chen H. Surf. Coat. Technol. 200 (2006) 3868