MEMS arrayed scanning probes for soft nanolithography

ECS Transactions

Volumn 3, Issue 10, 2006, Pages 463-472

  Li, S ^a   Liu, C ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; SCANNING;

BIOMOLECULES; DIP PEN NANOLITHOGRAPHY (DPN); SCANNING PROBE CONTACT PRINTING (SPCP);

PROBES;

EID: 33847022670     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2357285     Document Type: Conference Paper

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